Depth profiling of the Ge concentration in SiGe alloys usinginsituellipsometry during reactive‐ion etching
نویسندگان
چکیده
منابع مشابه
Depth profiling of the Ge concentration in SiGe alloys using in situ ellipsometry during reactive-ion etching
• A submitted manuscript is the author's version of the article upon submission and before peer-review. There can be important differences between the submitted version and the official published version of record. People interested in the research are advised to contact the author for the final version of the publication, or visit the DOI to the publisher's website. • The final author version ...
متن کاملthe effect of e-64 on the developmental competence of sheep cocs during in vitro maturation
in the present study, the effect of e-64 at different concentrations (0.5, 1, 5 and 10 µm) added to (1) the ivm medium on oocyte nuclear maturation and developmental competence of ovine oocytes, and (2) to the ivc medium on embryonic development of ovine embryos were investigated.
Bandstructure and photoluminescence of SiGe islands with controlled Ge concentration
The dependence of the photoluminescence (PL) emission wavelength of SiGe islands embedded into a Si matrix on their Ge concentration and gradient was investigated. Intense PL signals at wavelengths that can be shifted over most of the telecom wavelength range (1.38–1.77 mm) by varying the Ge concentration were observed. Using the structural island parameters determined by AFM, TEM, and a carefu...
متن کاملLateral Ge Diffusion During Oxidation of Si/SiGe Fins.
This Letter reports on the unusual diffusion behavior of Ge during oxidation of a multilayer Si/SiGe fin. It is observed that oxidation surprisingly results in the formation of vertically stacked Si nanowires encapsulated in defect free epitaxial strained SixGe1-x. High angle annular dark field scanning transmission electron microscopy (HAADF-STEM) shows that extremely enhanced diffusion of Ge ...
متن کاملthe effect of the record infancy in crimilly acts of guilties (in karaj city)
چکیده یکی از مهمترین دغدغه های بزرگ جوامع بشری، از دیر باز تا کنون که ذهن پژوهشگران و متخصصان بهداشت روانی و اجتماعی و دولتها رابه خود مشغول داشته، مسأله ی بزهکاری می باشد. شناخت کامل پدیده ی بزهکاری و بزهکار، علل وعوامل سقوط یک انسان، چگونگی درمان وی و درنهایت پیشگیری ازبزهکاری ودریک کلام سالم سازی یک جامعه، رسالت عظیم، انسانی ومقدسی می باشد که با بررسی شخصیت مجرم یعنی[ انسانی که تحت شرای...
15 صفحه اولذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Journal of Applied Physics
سال: 1993
ISSN: 0021-8979,1089-7550
DOI: 10.1063/1.353916